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Tool Order: Metryx reports improving acceptance of mass metrology for 300mm production

16 July 2010 | By Mark Osborne | News > Wafer Processing

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Mass metrology specialist, Metryx has seen a sharp recovery in business, with multiple Mentor mass metrology system orders received, including both new and repeat business, according to the company. Significantly, the orders come from companies based around the world, including the US, Europe and Asia.

The tools are being used for 300mm front-end of line (FEOL) and back-end of line (BEOL) metallization due to the Mentor's ability to measure thin metals and stacked layers. Metryx also noted that it was also seeing strong interest from emerging markets such as micro-electrical mechanical systems (MEMS), solar, light emitting diodes (LEDs) and 3D interconnect (IC), including through silicon via (TSV) and wafer bonding applications.

Dr. Adrian Kiermasz, President and CEO of Metryx."These recent business successes clearly demonstrate that Metryx is emerging from the global recession in a strong position to continue to deliver our innovative metrology," said Dr. Adrian Kiermasz, President and CEO of Metryx. "We are now seeing established customers starting to invest in additional capacity, with new and potential customers willing to drive their internal capital justification process based on our tools' demonstrated strong return on investment."

Metryx also noted that it was seeing mass metrology adopted across a number of process steps within the bulk acoustic wave (BAW) device manufacturing process as the tool enables the awareness of actual material density, which shortens the cycle between device design and device manufacture.

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