Online information source for semiconductor professionals

Tool Order: Memory manufacturer orders strip and RTP tools from Mattson

01 February 2010 | By Mark Osborne | News > Wafer Processing

Popular articles

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

TSMC honors suppliers at annual Supply Chain Management Forum - 03 December 2008

Sematech Litho Forum: Sematech mulling multi-beam mask writer effort - 12 May 2010

A memory manufacturer based in Asia has placed multiple orders with Mattson Technology for its ‘Suprema’ photoresist strip system and the Helios XP rapid thermal processing (RTP) system. Shipments are expected to start in the current first quarter.

"Since the introduction of the Helios XP to the market last year, we have seen increasing acceptance of the product by both memory and foundry customers due to its unique capabilities, including the industry's first RTP processing capabilities at temperatures down to 220 degrees Celsius and below,” commented David Dutton, President and CEO of Mattson Technology. “In strip, we continue to see Suprema leading the industry with superior on-wafer performance at low Cost-of-Ownership. As the overall market strengthens and our customers require additional capacity, we anticipate increasing demand of the Suprema and Helios XP products, driving share gains across our core market."

Related articles

Tool Order: Mattson receives strip tool order for 2X NAND flash node development - 10 November 2008

Tool Order: Mattson receives follow-on multi-system orders for Etch and strip systems - 22 June 2011

Tool Order: Mattson gains first Nexion etch system order - 26 March 2008

Tool Order: Japanese IC manufacturer purchases resist strip system from Mattson - 02 July 2008

Tool Order: Asia-based foundry purchases resist strip systems from Mattson - 16 June 2010

Reader comments

No comments yet!

Post your comment

Please enter the word you see in the image below: