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Tool Order: Memory manufacturer orders strip and RTP tools from Mattson

01 February 2010 | By Mark Osborne | News > Wafer Processing

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A memory manufacturer based in Asia has placed multiple orders with Mattson Technology for its ‘Suprema’ photoresist strip system and the Helios XP rapid thermal processing (RTP) system. Shipments are expected to start in the current first quarter.

"Since the introduction of the Helios XP to the market last year, we have seen increasing acceptance of the product by both memory and foundry customers due to its unique capabilities, including the industry's first RTP processing capabilities at temperatures down to 220 degrees Celsius and below,” commented David Dutton, President and CEO of Mattson Technology. “In strip, we continue to see Suprema leading the industry with superior on-wafer performance at low Cost-of-Ownership. As the overall market strengthens and our customers require additional capacity, we anticipate increasing demand of the Suprema and Helios XP products, driving share gains across our core market."

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