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Tool order: Memory IC maker places follow-on order for Nanometrics metrology systems

28 May 2009 | By Tom Cheyney | News > Wafer Processing

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nanometrics_atlas_xpNanometrics has secured a follow-on order from a leading memory IC customer for multiple Atlas metrology systems. The company said that the systems will be delivered in the second quarter as part of the chipmaker's plan to leverage Nanometrics’ technology across high-volume manufacturing lines, in support of film thickness, wafer stress/bow, and optical critical dimension (OCD) metrology.

“This latest order, both in scale and timing, demonstrates that our technology is a critical component for the manufacturing of leading generation memory devices,” said Michael Fischer, VP of sales at Nanometrics. “The OCD market is now established, as we’ve witnessed our customers increasingly migrating CD-SEM measurements over to Nanometrics’ OCD solution due to its ability to measure 3-D complex structures directly on memory arrays.

"These Atlas systems, as equipped, will allow seamless transition between thin film and OCD metrology by incorporating the NanoCD suite and the industry-leading capability of NanoDiffract. The NanoCD suite, launched last year, has increased the adoption and proliferation of our OCD solutions into high-volume manufacturing."

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