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Tool Order: Mattson’s Millios Flash RTP system receives final acceptance

14 April 2010 | By Emma Hughes | News > Wafer Processing

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Mattson's MilliosMattson Technology has received final acceptance on the Millios Flash Rapid Thermal Processing system, which the company had previously shipped to a leading global semiconductor manufacturing facility in Asia. The system had been under production qualification in millisecond anneal applications for advanced logic devices.

Andreas Toennis, senior vice president and general manager of Mattson Technology's thermal products group said, "We are extremely pleased that our long-standing customer has expressed further confidence in Mattson Technology and our leadership in advanced thermal processing. This Millios recognition from the customer is testament to our unique advantages in millisecond anneal applications resulting in improved device performance and yield."

In addition, the system was evaluated for its production capability and has shown to meet or exceed all expectations while demonstrating industry-leading throughput.

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