Online information source for semiconductor professionals

Tool Order: Mattson’s Millios Flash RTP system receives final acceptance

14 April 2010 | By Emma Hughes | News > Wafer Processing

Popular articles

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

TSMC honors suppliers at annual Supply Chain Management Forum - 03 December 2008

Sematech Litho Forum: Sematech mulling multi-beam mask writer effort - 12 May 2010

Mattson's MilliosMattson Technology has received final acceptance on the Millios Flash Rapid Thermal Processing system, which the company had previously shipped to a leading global semiconductor manufacturing facility in Asia. The system had been under production qualification in millisecond anneal applications for advanced logic devices.

Andreas Toennis, senior vice president and general manager of Mattson Technology's thermal products group said, "We are extremely pleased that our long-standing customer has expressed further confidence in Mattson Technology and our leadership in advanced thermal processing. This Millios recognition from the customer is testament to our unique advantages in millisecond anneal applications resulting in improved device performance and yield."

In addition, the system was evaluated for its production capability and has shown to meet or exceed all expectations while demonstrating industry-leading throughput.

Related articles

Tool Order: Mattson receives strip tool order for 2X NAND flash node development - 10 November 2008

Mattson in sub-45nm flash anneal program with global semiconductor manufacturer - 21 April 2008

Tool Order: Fraunhofer CNT selects Mattson‚??s ‚??Millios‚?? system - 28 October 2010

Tool Order: Japanese IC manufacturer purchases resist strip system from Mattson - 02 July 2008

Tool Order: Mattson wins multiple orders for ‚??paradigmE‚?? etch system - 13 December 2010

Reader comments

No comments yet!

Post your comment

Name:
Email:
Please enter the word you see in the image below: