Online information source for semiconductor professionals
Tool Order: Mattson’s Millios Flash RTP system receives final acceptance
Popular articles
Sematech Litho Forum: Sematech mulling multi-beam mask writer effort - 12 May 2010
Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008
TSMC hosts 2008 Green Forum on ‘green’ factories - 31 October 2008
TSMC honors suppliers at annual Supply Chain Management Forum - 03 December 2008
Samsung and Micron gain most market share in DRAM crisis - 17 February 2009
Mattson Technology has received final acceptance on the Millios Flash Rapid Thermal Processing system, which the company had previously shipped to a leading global semiconductor manufacturing facility in Asia. The system had been under production qualification in millisecond anneal applications for advanced logic devices.
Andreas Toennis, senior vice president and general manager of Mattson Technology's thermal products group said, "We are extremely pleased that our long-standing customer has expressed further confidence in Mattson Technology and our leadership in advanced thermal processing. This Millios recognition from the customer is testament to our unique advantages in millisecond anneal applications resulting in improved device performance and yield."
In addition, the system was evaluated for its production capability and has shown to meet or exceed all expectations while demonstrating industry-leading throughput.