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Tool Order: Mattson wins multiple orders for ‚??paradigmE‚?? etch system

13 December 2010 | By Mark Osborne | News > Wafer Processing

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A leading NAND Flash memory manufacturer has placed multiple tool orders with Mattson Technology for its ‘paradigmE,’ high volume production, etch system. The systems will be used will be used in an extended set of etch applications for the volume production of advanced NAND flash devices. Mattson said that some of the systems had already been shipped.

"The paradigmE is currently being used for a wide range of etch applications, and the follow-on systems are expected to be used for the customer's NAND flash fab," said Rene George, vice president and general manager of Mattson Technology's Plasma Products Group.

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