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Tool Order: Mattson receives its largest etch tool order

09 March 2011 | By Mark Osborne | News > Wafer Processing

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A leading semiconductor manufacturer has placed a significant order with Mattson Technology for its paradigmE etch systems, making it the largest single etch tool order in the history of equipment suppliers. The tools will be used for volume production of advanced memory devices, according to Mattson. Most of the tools ordered have already been shipped to the customer.

"We recently shipped our etch systems for production into a new etch application set that doubles our etch application portfolio, and this latest order provides further confirmation that Mattson Technology is executing as planned on our strategy of expanding the Company's presence in the etch market," said Rene George, vice president and general manager of Mattson Technology's Plasma Products Group. "The paradigmE was selected over competitive products based on its ability to provide superior on-wafer results, unmatched process versatility, increased productivity and capital efficiency."

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