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Tool Order: Mattson receives follow-on multi-system orders for Etch and strip systems

22 June 2011 | By Mark Osborne | News > Wafer Processing

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A leading semiconductor manufacturer has placed follow-on multi-system orders with Mattson Technology. The equipment supplier said that order included ‘paradigmE’ etch and ‘SUPREMA’ strip tools and that shipments had already begun. The systems will be used for advanced etch and strip applications to produce chips that will be used in devices such as smart phones, personal computers and solid state drives, according to Mattson.

"With these latest repeat orders, our customer -- a technology leader -- is validating the benefits of the technology and productivity advantages of our latest-generation tools," said Rene George, vice president and general manager of Mattson Technology's Plasma Products Group. "The paradigmE etch and SUPREMA strip systems were chosen because they offer proven reliability, very low cost of ownership, and superior process performance. These orders for etch and strip provide a complete processing package and demonstrate the value of our combined plasma technology competencies to deliver advanced applications at next-generation technology nodes for our customers."

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