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Tool Order: Mattson gains first Nexion etch system order

26 March 2008 | By Obi Oputa | News > Wafer Processing

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MattsonA memory manufacturer with 300mm fabs in Asia has ordered two Nexion anisotropic etch tools, the first official orders Mattson Technology has received since announcing evaluations were under way with a memory manufacturer in 2006. 

"This order is of particular significance to Mattson," noted Randy Matsuda, Senior Vice President and General Manager of Mattson Technology's Etch Division, "as it is a clear validation that Mattson's advanced technology and leading COO delivers solid value to our customers. By expanding into the Etch arena, we effectively double Mattson's served-available-market and strengthen the Company to capitalize on future growth opportunities."

The Nexion etch system is based on Mattson’s inductively coupled plasma (ICP) source technology and standard wafer transfer platform.

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