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Tool Order: Major Korean memory fab selects Mattson’s Suprema system
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Mattson’s ‘Suprema’ photoresist strip system has been selected by a
major Korea-based NAND flash memory manufacturer. The tool is due to be
shipped to the customer’s 300mm fab for use in FEOL manufacturing.
"We have enjoyed a long relationship with this manufacturer in their back-end-of-line (BEOL) processes, and we are pleased that they chose to extend the Suprema system's position in their advanced manufacturing facility for their FEOL processes,” said Neal Holmlund, Senior Vice President and General Manager of Mattson Technology's Surface Cleaning Group.
By Síle Mc Mahon