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Tool Order: Major Japanese Chipmaker buys a VIISta HC ion-implanter

28 October 2005 | By Syanne Olson | News > Wafer Processing

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A major Japanese IC manufacturer has placed an order for a single wafer high current ion-implanter from Varian Semiconductor Equipment Associates, Inc. The tool, a VIISta 300mm wafer system is the first tool order the Japanese company has placed with Varian Semiconductor and is to be used for 65nm processing duties. "For the first time, this customer placed an order for Varian Semiconductor's VIISta HC expanding the Company's considerable lead in single wafer high current," said Gary Dickerson, chief executive officer of  Varian Semiconductor. Dickerson continued, "As Japan continues to transition from batch to single wafer, Varian Semiconductor's VIISta single wafer high current tools are becoming the tool of choice based on key architectural advantages.

The combined advantages of high productivity, superior particle control and outstanding device performance result in Varian Semiconductor further increasing its gains in ion implant market share."  

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