Online information source for semiconductor professionals

Tool Order: Major foundry selects dry strip system from Axcelis

17 February 2010 | By Mark Osborne | News > Wafer Processing

Popular articles

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

TSMC honors suppliers at annual Supply Chain Management Forum - 03 December 2008

Sematech Litho Forum: Sematech mulling multi-beam mask writer effort - 12 May 2010

Integra dry strip system from Axcelis TechnologiesA major foundry has selected the ‘Integra’ dry strip system from Axcelis Technologies for its most advanced production facility. The customer was claimed to have selected the Integra over competitive products because of its significant advantages in productivity, advanced process capabilities and manufacturing flexibility. Delivery times were not disclosed.

Related articles

UMC makes Axcelis stripper ‚??tool of record‚?Ě - 17 October 2005

Tool Order: Axcelis wins head-to-head evaluation of dry strip cleaning system - 15 September 2009

Tool Order: Axcelis‚?? strip system becomes tool of record at large IC manufacturer - 17 December 2010

Tool Order: Mattson receives strip tool order for 2X NAND flash node development - 10 November 2008

Tool Order: Major Asian foundry places multiple Suprema order with Mattson - 14 July 2008

Reader comments

No comments yet!

Post your comment

Please enter the word you see in the image below: