Online information source for semiconductor professionals

Tool Order: Logic manufacturer purchases an ALD tool from ASM International

29 October 2009 | By Mark Osborne | News > Wafer Processing

Popular articles

New Product: Applied Materials new EUV reticle etch system provides nanometer-level accuracy - 19 September 2011

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

New Product: ASML Brion‚??s Tachyon MB-SRAF enables OPC-like compute times - 19 September 2011

A leading logic manufacturer and a member of a key semiconductor industry technology alliance, has purchased a ‘Pulsar’ high-k atomic layer deposition (ALD) tool from ASM International. The system, which was delivered earlier in October, will be used to deposit hafnium-based higk-k gate dielectrics for 32 and 28nm logic devices.

"This order is highly representative of ASM's core strength of taking customers from process development to high volume manufacturing," said Glen Wilk, Product Manager for ALD and Epitaxy at ASM. "We have worked with this customer extensively to demonstrate the Pulsar reactor's ability to scale the gate dielectric and overcome all the challenges of integrating high-k into their device. We have now entered the next phase of our collaboration and are actively engaged in the successful transition to volume manufacturing."

Related articles

Tool Order: Mattson receives strip tool order for 2X NAND flash node development - 10 November 2008

Tool Order: Singapore fab places multiple inspection system order with Rudolph - 08 May 2008

Tool Order: FSI Ships ‚??ORION‚?? system to memory manufacturer - 24 November 2010

Tool Order: FSI to supply ‚??ORION‚?? single wafer cleaning system - 18 March 2010

Tool Order: Major Japanese Chipmaker buys a VIISta HC ion-implanter - 28 October 2005

Reader comments

No comments yet!

Post your comment

Please enter the word you see in the image below: