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Tool Order: Logic and memory manufacturers select Optima HDx high current implanter from Axcelis

20 January 2010 | By Mark Osborne | News > Wafer Processing

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Multiple orders have been placed with Axcelis Technologies for its Optima HDx high current implanter’s that come from both logic and memory customers in Asia and Europe. Axcelis said that the new orders also included new customer penetrations as well as repeat capacity buys. Shipments are expected to begin in the first quarter of 2010.

Mary Puma, chairman and CEO commented, “Axcelis developed the Optima HDx in anticipation of the growing need for higher beam currents and greater precision for high current implants. These recent orders demonstrate the value chipmakers place on the product’s ability to break barriers in both of these areas.”

The Optima HDx high current implanter uses spot beam technology and short beamline deliver that is claimed to offer the industry’s highest drift beam currents, 38% higher than its competitors.

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