Online information source for semiconductor professionals
Tool Order: Logic and memory manufacturers select Optima HDx high current implanter from Axcelis
Popular articles
â??Velocityâ?? the new buzzword in Intelâ??s PQS annual awards - 12 April 2012
Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008
New Product: Applied Materials new EUV reticle etch system provides nanometer-level accuracy - 19 September 2011
Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008
TSMC honors suppliers at annual Supply Chain Management Forum - 03 December 2008
Multiple orders have been placed with Axcelis Technologies for its Optima HDx high current implanter’s that come from both logic and memory customers in Asia and Europe. Axcelis said that the new orders also included new customer penetrations as well as repeat capacity buys. Shipments are expected to begin in the first quarter of 2010.
Mary Puma, chairman and CEO commented, “Axcelis developed the Optima HDx in anticipation of the growing need for higher beam currents and greater precision for high current implants. These recent orders demonstrate the value chipmakers place on the product’s ability to break barriers in both of these areas.”
The Optima HDx high current implanter uses spot beam technology and short beamline deliver that is claimed to offer the industry’s highest drift beam currents, 38% higher than its competitors.