Online information source for semiconductor professionals

Tool Order: Levitech sells Levitor RTP system into GaN-based LED market

22 February 2011 | By Mark Osborne | News > Wafer Processing

Popular articles

New Product: Applied Materials new EUV reticle etch system provides nanometer-level accuracy - 19 September 2011

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

New Product: ASML Brion‚??s Tachyon MB-SRAF enables OPC-like compute times - 19 September 2011

ASM International spin-off, Levitech has found a new market for its floating wafer RTP system in form of the GaN-based LED market. Levitech has sold a Levitor 4300 to an unidentified ‘leading Asian LED manufacturer.’ The system was initially designed for semiconductor wafer RTP processes but failed to gain traction in the market and was eventually spun-off after years of investment in the novel technology.

“The Levitor was selected for its ability to provide uniform fast heating of (transparent) sapphire LED wafers., The considerable reduction of power consumption of the LED devices was a strong motivator to work with the patented annealing technology of Levitech”, commented Nobuyuki Ura, Director of Levitech Japan. “Levitor’s unique capability to process 2”, 3” and 4” sapphire wafers with high throughput is well received in the LED market.”

The system was said to have already been sold and delivered.

Related articles

Order Focus: Levitech sells RTP system to European foundry - 13 January 2011

Levitech secures ‚?¨5 million investment and ‚?¨2.4 million innovation credit - 07 March 2011

ASM International to R.I.P. RTP - 29 April 2008

ASM‚??s Levitor RTP technology rises from the ashes - 10 June 2009

Tool Order: Major Japanese Chipmaker buys a VIISta HC ion-implanter - 28 October 2005

Reader comments

No comments yet!

Post your comment

Please enter the word you see in the image below: