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Tool Order: Levitech sells Levitor RTP system into GaN-based LED market

22 February 2011 | By Mark Osborne | News > Wafer Processing

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ASM International spin-off, Levitech has found a new market for its floating wafer RTP system in form of the GaN-based LED market. Levitech has sold a Levitor 4300 to an unidentified ‘leading Asian LED manufacturer.’ The system was initially designed for semiconductor wafer RTP processes but failed to gain traction in the market and was eventually spun-off after years of investment in the novel technology.

“The Levitor was selected for its ability to provide uniform fast heating of (transparent) sapphire LED wafers., The considerable reduction of power consumption of the LED devices was a strong motivator to work with the patented annealing technology of Levitech”, commented Nobuyuki Ura, Director of Levitech Japan. “Levitor’s unique capability to process 2”, 3” and 4” sapphire wafers with high throughput is well received in the LED market.”

The system was said to have already been sold and delivered.

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