Online information source for semiconductor professionals
Tool Order: Levitech sells Levitor RTP system into GaN-based LED market
Popular articles
â??Velocityâ?? the new buzzword in Intelâ??s PQS annual awards - 12 April 2012
Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008
New Product: Applied Materials new EUV reticle etch system provides nanometer-level accuracy - 19 September 2011
Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008
TSMC honors suppliers at annual Supply Chain Management Forum - 03 December 2008
ASM International spin-off, Levitech has found a new market for its floating wafer RTP system in form of the GaN-based LED market. Levitech has sold a Levitor 4300 to an unidentified ‘leading Asian LED manufacturer.’ The system was initially designed for semiconductor wafer RTP processes but failed to gain traction in the market and was eventually spun-off after years of investment in the novel technology.“The Levitor was selected for its ability to provide uniform fast heating of (transparent) sapphire LED wafers., The considerable reduction of power consumption of the LED devices was a strong motivator to work with the patented annealing technology of Levitech”, commented Nobuyuki Ura, Director of Levitech Japan. “Levitor’s unique capability to process 2”, 3” and 4” sapphire wafers with high throughput is well received in the LED market.”
The system was said to have already been sold and delivered.