Online information source for semiconductor professionals

Tool Order: leading foundry purchases several NovaScan systems

05 May 2009 | By Mark Osborne | News > Wafer Processing

Popular articles

New Product: Applied Materials new EUV reticle etch system provides nanometer-level accuracy - 19 September 2011

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

New Product: ASML Brion‚??s Tachyon MB-SRAF enables OPC-like compute times - 19 September 2011

A leading global foundry has ordered several NovaScan stand-alone metrology systems from Nova Measuring Instruments. The foundry has been a previous user of NovaScan technology. The new tolls will be used for Back End Of Line (BEOL) Copper interconnect process control.

"At technology nodes of 45nm and below, Optical CD, being able to accurately visualize the Copper line profile, becomes an enabling technology for Copper process control.,” noted Noam Shintel, Director of Corporate Marketing at Nova. “We are delighted that this technology leading foundry continues to deploy Nova's stand-alone and integrated metrology tools and we look forward to continue our fruitful cooperation supporting them with our advanced Optical CD solutions in the future."

Related articles

Tool Order: Nova wins multiple copper metrology order from a foundry - 30 March 2009

Tool Order: Nova gets follow-on orders from major foundry in China - 04 March 2008

Milestone: Nova installs 100th metrology tool in South Korea - 28 April 2008

Tool Order: Nova‚??s integrated metrology systems now used by two flash memory manufacturers - 07 July 2009

New Product: Nova offers 2D/3D modeling on high throughput NovaScan 3090Next platform - 29 August 2006

Reader comments

No comments yet!

Post your comment

Please enter the word you see in the image below: