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Tool Order: leading foundry purchases several NovaScan systems

05 May 2009 | By Mark Osborne | News > Wafer Processing

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A leading global foundry has ordered several NovaScan stand-alone metrology systems from Nova Measuring Instruments. The foundry has been a previous user of NovaScan technology. The new tolls will be used for Back End Of Line (BEOL) Copper interconnect process control.

"At technology nodes of 45nm and below, Optical CD, being able to accurately visualize the Copper line profile, becomes an enabling technology for Copper process control.,” noted Noam Shintel, Director of Corporate Marketing at Nova. “We are delighted that this technology leading foundry continues to deploy Nova's stand-alone and integrated metrology tools and we look forward to continue our fruitful cooperation supporting them with our advanced Optical CD solutions in the future."

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