Online information source for semiconductor professionals

Tool Order: Korean DRAM manufacturer selects Aixtron‚??s ALD tool

16 June 2010 | By Mark Osborne | News > Wafer Processing

Popular articles

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

TSMC honors suppliers at annual Supply Chain Management Forum - 03 December 2008

Sematech Litho Forum: Sematech mulling multi-beam mask writer effort - 12 May 2010

A major Korea-based DRAM manufacturer has selected Aixtron’s next generation QXP 8300 ALD tool for high-k deposition. The tool will be fully operational at the customer’s site by the end of the second quarter 2010.

“As the industry regains its momentum in 2010 customers are clearly founding their growth on cutting edge innovation in a production proven and economically winning package,” commented Dr. Bernd Schulte, COO of Aixtron. “Nowhere is this probably more critical than in deposition of next generation high k and metal films and AIXTRON is proud to be a solution provider for these challenges.”

Related articles

Tool Order: Mattson receives strip tool order for 2X NAND flash node development - 10 November 2008

Tool Order: Inotera places US$74.6 million follow-on order with ASML - 27 April 2011

Tool Order: Singapore fab places multiple inspection system order with Rudolph - 08 May 2008

Tool Order: Major Japanese Chipmaker buys a VIISta HC ion-implanter - 28 October 2005

Tool order: Leading memory manufacturer receives follow-on Lynx System from Nanometrics - 20 May 2009

Reader comments

No comments yet!

Post your comment

Name:
Email:
Please enter the word you see in the image below: