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Tool Order: Korean DRAM manufacturer selects Aixtron‚??s ALD tool

16 June 2010 | By Mark Osborne | News > Wafer Processing

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A major Korea-based DRAM manufacturer has selected Aixtron’s next generation QXP 8300 ALD tool for high-k deposition. The tool will be fully operational at the customer’s site by the end of the second quarter 2010.

“As the industry regains its momentum in 2010 customers are clearly founding their growth on cutting edge innovation in a production proven and economically winning package,” commented Dr. Bernd Schulte, COO of Aixtron. “Nowhere is this probably more critical than in deposition of next generation high k and metal films and AIXTRON is proud to be a solution provider for these challenges.”

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