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Tool Order: Inotera purchases lithography tools from ASML

20 April 2011 | By Mark Osborne | News > Lithography

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With DRAM manufacturer, Inotera migrating technology to Micron’s stack DDR 3 50nm process, the Taiwan-based firm has already been active this year in purchasing a range of new processing equipment. However, the latest purchase order is for lithography tools to be supplied by ASML at a cost of US$23.2 million.

With the letter of credit deal roughly equivalent to the average selling price for ASML’s lithography tools, the latest purchase suggest only 1 tool has been purchased. Specific details regarding the tool were not revealed by Inotera.

Micron Technology has been a long-standing customer of ASML and process changes and transfers frequently mean that the same equipment is used for faster ramps and higher yields.

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