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Tool Order: Greek nanotechnology centre selects 100kV lithography system from Vistec
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The first 100kV lithography system in Greece is to be supplied by Vistec Lithography to the National Center for Scientific Research (NCSR Demokritos). The nanotechnology centre purchased an EBPG5000plusES system for one of its associated Institutes, IMEL (Installed at the Institute of Microelectronics). “Due to the different fields of research carried out at the IMEL we had very special demands for the new patterning system,” noted Professor Dimitris Tsoukalas, Director of IMEL. “It not only had to be capable of a multi user environment but also had to provide high class and efficient nano-lithography in all areas of our activities spanning from nanoelectronic devices to sensors and MEMS/NEMS. The EBPG5000plusES is the perfect match to these requirements and it will allow IMEL to further improve its position at the nanotechnology forefront.”
“The EBPG5000plusES will be the first 100kV system in Greece. That will not only enable the institute to maintain its leading role in national nano-research but also to participate in European research projects, networks of excellence, and technology platforms at the highest level,” added Rainer Schmid, General Manager at Vistec Lithography.