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Tool Order: Globalfoundries Fab 7 receives 1000th VECTOR PECVD system from Novellus

02 February 2010 | By Mark Osborne | News > Wafer Processing

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Novellus Systems has shipped the 1000th VECTOR plasma-enhanced chemical vapor deposition (PECVD) system to Globalfoundries Singapore 300mm facility, Fab 7. The tool will be used for high-volume manufacturing at the 65nm technology node and beyond. Formerly Chartered Semiconductor, the company purchased its first VECTOR system in 2004. Introduced in July of 2000, the VECTOR system is a manufacturing workhorse used to deposit a wide range of dielectric applications in FEOL and BEOL processes.

“The Novellus VECTOR platform is used in high-volume production at 65nm and in the advanced 45/40nm technology nodes in Fab 7 for both FEOL and BEOL dielectric applications,” said Peter Benyon, Head of Fab 7 operations at Globalfoundries. “We look forward to continuing our partnership with Novellus in developing cost-effective, advanced technological solutions to help our customers rapidly bring their innovative designs to market.”

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