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Tool Order: Gigaphoton ships first GT62A 90W laser
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Gigaphoton has shipped the first of its new GT62A ArF 90W laser light
sources to a lithography equipment company that is designed for
double-patterning immersion lithography.
"We successfully introduced and delivered the first unit of the GT62A in a 60-watt version to meet the specifications of one of our customers,” commented Dr. Yuji Watanabe, President and representative Director of Gigaphoton, Inc. “Now, by using the design concept for the GT platform, the GT62A can be upgraded to 90 watts, ensuring high product reliability and flexible solutions for our customers.”