Online information source for semiconductor professionals
Tool Order: Gigaphoton ships first GT62A 90W laser
Popular articles
Micron moving fast on Hynix in Q208 NAND flash rankings, says iSuppli - 19 August 2008
Numonyx to close California Technology Center - 12 August 2008
Qimonda starts major reorganization: exits PC DRAM market - 13 October 2008
Micron close to Inotera share purchase, says Gartner - 06 October 2008
Applied Materials sees higher CapEx spending for 2009 - 15 August 2008
Gigaphoton has shipped the first of its new GT62A ArF 90W laser light
sources to a lithography equipment company that is designed for
double-patterning immersion lithography.
"We successfully introduced and delivered the first unit of the GT62A in a 60-watt version to meet the specifications of one of our customers,” commented Dr. Yuji Watanabe, President and representative Director of Gigaphoton, Inc. “Now, by using the design concept for the GT platform, the GT62A can be upgraded to 90 watts, ensuring high product reliability and flexible solutions for our customers.”