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Tool Order: German institute selects e-beam litho system from Vistec
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The Ferdinand-Braun-Institute (FBH), which specialises in opto-electronic devices has ordered a Series Variable Shaped Beam lithography tool from Vistec. The ttol will be used for the development of electronic and opto-electronic high-power devices based on GaAs and GaN.
“The investment is vital for the FBH in order to remain competitive. The system’s performance, as demonstrated in a series, of tests meets our demands and will provide a solid basis for future research and development of high-value products and services,” noted Dr. Krueger, Head of Process Technology Department at FBH.
The Vistec SB250 Series was designed as a universal and cost-effective electron-beam lithography system for both direct write and mask making applications.