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Tool Order: FSI Ships ‘ORION’ system to memory manufacturer
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FSI International has shipped a single wafer cleaning system to a leading Asian memory manufacturer. The closed chamber ORION tool will be used in ashless all-wet photoresist strip and wet metal etch applications for the development and production of memory devices. FSI said that revenue from the order would begin in the second half of 2011, once production use of the equipment had started.