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Tool Order: FSI International wins repeat order from foundry
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A leading IC foundry has placed a repeat order with FSI International for its ‘ORION’ single wafer cleaning system. The customer will use the system for back-end-of-line (BEOL) cleaning processes and is expected to be shipped in the fourth quarter of fiscal 2011. FSI noted both foundry and logic manufacturers were finding low-k materials and metal film stacks used for advanced devices much more sensitive to wet cleaning than previous generations of BEOL processes.