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Tool Order: Fraunhofer CNT selects Mattson’s ‘Millios’ system
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The Fraunhofer Center Nanoelectronic Technologies (CNT) has selected Mattson Technology’s advanced millisecond anneal system, the Millios for anneal applications at the 3Xnm technology nodes and below. The Millios system has been upgraded with the latest temperature measurement and control features for research work at CNT. "CNT's objective is to accelerate the introduction of new semiconductor technologies from R&D to production," said Fraunhofer CNT's Professor Dr. Peter Kücher. "We look forward to continuing to work with Mattson Technology to develop enabling process technologies that will help our semiconductor partners achieve increasingly smaller geometries and fabricate more powerful chips in the next generation of IC manufacturing."
The Millios system features a patented arc lamp technology that provides enhanced thermal control for advanced applications such as the formation of gate stacks, nickel silicides, and ultra-shallow junctions.