Online information source for semiconductor professionals

Tool Order: Foundry places resist strip order with Mattson

16 December 2009 | By Mark Osborne | News > Wafer Processing

Popular articles

New Product: Applied Materials new EUV reticle etch system provides nanometer-level accuracy - 19 September 2011

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

New Product: ASML Brion‚??s Tachyon MB-SRAF enables OPC-like compute times - 19 September 2011

A leading semiconductor foundry based in Asia has placed a multiple systems order with Mattson Technology for its ‘Suprema’ photoresist strip tool. The systems will be used for high dose implant strip (HDIS), which is the most difficult dry strip process. The tool shipments will start in the current quarter and continue into the first half of 2010.

“This selection by our long-standing customer is a further testament to Suprema's advantages in high reliability and productivity, coupled with enabling process performance and flexibility," commented Randy Matsuda Sr. Vice President and General Manager of Mattson Technology's Plasma Products Group."The HDIS process qualified for production at the customer site is one of the most challenging in the industry. For the formation of shallow junctions in advanced devices, it is critical that we minimize the silicon loss following a clean removal of heavily implanted photoresist.

Related articles

Tool Order: Major Asian foundry places multiple Suprema order with Mattson - 14 July 2008

Tool Order: Mattson receives strip tool order for 2X NAND flash node development - 10 November 2008

Tool Order: Japanese IC manufacturer purchases resist strip system from Mattson - 02 July 2008

Tool Order: Asia-based foundry purchases resist strip systems from Mattson - 16 June 2010

Tool Order: Mattson wins strip system order for 32nm HKMG development - 20 October 2008

Reader comments

No comments yet!

Post your comment

Please enter the word you see in the image below: