A leading semiconductor foundry based in Asia has placed a multiple systems order with Mattson Technology for its ‘Suprema’ photoresist strip tool. The systems will be used for high dose implant strip (HDIS), which is the most difficult dry strip process. The tool shipments will start in the current quarter and continue into the first half of 2010.
“This selection by our long-standing customer is a further testament to Suprema's advantages in high reliability and productivity, coupled with enabling process performance and flexibility," commented Randy Matsuda Sr. Vice President and General Manager of Mattson Technology's Plasma Products Group."The HDIS process qualified for production at the customer site is one of the most challenging in the industry. For the formation of shallow junctions in advanced devices, it is critical that we minimize the silicon loss following a clean removal of heavily implanted photoresist.