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Tool Order: Foundries place multiple orders for Mattson‚??s strip system

13 July 2010 | By Mark Osborne | News > Wafer Processing

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Two leading semiconductor foundries based in Asia have placed multiple orders for Mattson Technology’s Suprema and Aspen 3 Strip systems. The systems will be used for various photoresist strip processes as they ramp their production volumes. All tools will be delivered to both customers by the end of the current third quarter.

“Our leading foundry customers require challenging dry strip solutions, including minimizing silicon loss during the high dose implant strip (HDIS) process,” noted Randy Matsuda, Sr. Vice President and General Manager of Mattson Technology's Global Business Operations.

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