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Tool Order: China foundry selects Aviza Technologyâ??s Omega fxP etch system
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Aviza Technology said that a key foundry based in China has ordered
its Omega fxP system, with two Inductively Coupled Plasma (ICP) process
modules. The system will be used for silicon trench and polysilicon
etch-back processes in manufacturing power devices.
"Aviza is proud to announce this win as it expands the market penetration of the Omega fxP etch tools into this important region," said Kevin Crofton, Vice President and General Manager, PVD/CVD/Etch Business Unit of Aviza Technology. "Aviza's success with our Sigma fxP PVD tool already installed at this customer's facility played a role in securing this order, having firmly demonstrated first-hand Aviza's technology and process expertise as well as our commitment to our customer."