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Tool Order: Axcelis wins head-to-head evaluation of dry strip cleaning system

15 September 2009 | By Mark Osborne | News > Wafer Processing

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A major global memory manufacturer has placed a follow-on order with Axcelis for its Integra RS photoresist dry strip cleaning system after a head-to-head evaluation with the unidentified competitors. The equipment supplier said that the tools would be used for volume manufacturing of NAND and DRAM devices, as well as for the development of next generation memory ICs.

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