One of the world's largest semiconductor manufacturers has selected Axcelis Technologies ‘Integra’ ES plasma dry strip system as the process tool of record. The company has received the first in a series of expected orders, which will be used to support the customer's 32nm and 28nm technology manufacturing capacity expansion. Axcelis said the tools would begin shipping in December 2010.
"The Integra ES was selected to perform photoresist strip levels over sensitive high-K and metal gate materials, after an extensive evaluation and process development program. Our customer was attracted to the device performance benefits achieved when running the resist strip processes over sensitive gate stack materials with non-oxidizing chemistries," said Bill Bintz, senior vice president of marketing for Axcelis Technologies.