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Tool Order: Axcelis sells Optima XE implanters to Asia-based memory manufacturers
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Two major manufacturers of memory devices located in Asia have purchased Optima XE single wafer high energy ion implanters from Axcelis Technologies. The systems will be used for the development of 32nm node IC’s, as well as for high volume manufacturing. Axcelis had previously shipped multiple tools to potential customers last year for evaluation.
“The Optima XE offers unique technical advantages to customers striving to meet the demands of high volume device manufacturing at 32nm and beyond,” commented Mary Puma, Chairman and CEO, Axcelis Technologies.