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Tool Order: Axcelis receives major order for Optima HDx implanters

04 May 2010 | By Mark Osborne | News > Wafer Processing

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One of the world's largest semiconductor manufacturers in Asia has placed a multiple system order for Axcelis Technologies ‘Optima HDx’ high current implanter tool. The systems are scheduled to start shipping in the second quarter of 2010. Axcelis said that it expected to receive additional follow-on orders as the company continues to meet increasing market demand for its products.

"We're excited about the opportunity to expand our installed base with one of the most innovative leaders in chip manufacturing and the digital revolution, and work collaboratively to support their growth," commented Mary Puma, Chairman and CEO of Axcelis Technologies.

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