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Tool Order: Avago to use Rudolph‚??s NSX inspection systems for optoelectronic devices

04 February 2011 | By Mark Osborne | News > Wafer Processing

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Avago Technologies Singapore fab has selected another Rudolph Technologies NSX inspection system for front-end inspection for its advanced optoelectronic devices. The first NSX System shipped in the fourth quarter of 2010, while the latest tool order will ship this quarter.

“As our production volumes scale up, we have turned increasing attention to improving process yields,” commented Tom White, Avago’s worldwide director of Optoelectronics Devices Operation. “The NSX System will allow us to improve the reliability and repeatability of our inspection procedures and our operation efficiency. In addition, we are using the Rudolph tools to measure critical dimension and overlay metrics at a significant cost savings over standalone metrology tools.”

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