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Tool Order: Asia-based foundry taps Nova for 45nm etch metrology
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A major foundry in Asia Pacific has decided to deploy Nova Measuring Instruments’ NovaScan Integrated Metrology (IM) solution with its ‘NovaMARS’shape profiling software, for 45nm gate etch Advanced Process Control (APC). The company expects additional tools to be ordered and installed during 2010 from this particular foundry. "Foundries continuously deal with a large variety of products, combined with an ever increasing need to tighten process control and reduce process variability," commented Noam Shintel, Director of Corporate Marketing at Nova. "Our leading Integrated Metrology platform enables fast and accurate closed-loop control of the Etcher, resulting in higher yield and improved productivity for our customers. Expanding our product reach into more areas of the fab through a broadened product offering has become part of our strategy and we expect this trend to continue into the future."