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Tool Order: Asia-based foundry purchases resist strip systems from Mattson
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A leading foundry based in Asia has placed multiple orders for the Mattson Technology’s ‘Suprema’ photoresist strip system. The systems would be used for all photoresist strip processes on both front-end-of-line (FEOL) and back-end-of-line (BEOL) applications. The tool shipments will start in the current quarter and continue into 2011. “The orders represent all dry strip requirements as our customer ramps production to meet their increasing chip demand,” noted Randy Matsuda, Sr. Vice President and General Manager of Mattson Technology's Plasma Products Group.