Online information source for semiconductor professionals
Tool Order: Asia-based foundry purchases resist strip systems from Mattson
Popular articles
Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008
â??Velocityâ?? the new buzzword in Intelâ??s PQS annual awards - 12 April 2012
Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008
TSMC honors suppliers at annual Supply Chain Management Forum - 03 December 2008
Sematech Litho Forum: Sematech mulling multi-beam mask writer effort - 12 May 2010
A leading foundry based in Asia has placed multiple orders for the Mattson Technology’s ‘Suprema’ photoresist strip system. The systems would be used for all photoresist strip processes on both front-end-of-line (FEOL) and back-end-of-line (BEOL) applications. The tool shipments will start in the current quarter and continue into 2011. “The orders represent all dry strip requirements as our customer ramps production to meet their increasing chip demand,” noted Randy Matsuda, Sr. Vice President and General Manager of Mattson Technology's Plasma Products Group.