Online information source for semiconductor professionals

Tool Order: Asia-based foundry chooses Mattson‚??s ‚??paradigmE etcher

25 January 2010 | By Mark Osborne | News > Wafer Processing

Popular articles

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

TSMC honors suppliers at annual Supply Chain Management Forum - 03 December 2008

Sematech Litho Forum: Sematech mulling multi-beam mask writer effort - 12 May 2010

A leading foundry customer in Asia has selected Mattson Technology’s new etch system, the paradigmE, the fourth customer to adopt the system, according to the company. Mattson said that the system had been evaluated by the customer on a range of challenging dielectric etch applications at leading technology nodes.

"The rapid adoption of our paradigmE system by both memory and foundry customers further validates the advancement we are making in dielectric etch,” commented Randy Matsuda, Senior Vice President and General Manager of Mattson Technology's Plasma Products Group. “Our unique ability to independently control ion energy and ion density while maintaining a very low energy level in the etch chamber allows our customers to realize enhanced process performance as well as improved yield. In addition, the paradigmE is built on our high-productivity platform and offers differentiated etch capabilities at low Cost-of-Ownership."
 

Related articles

Tool Order: Mattson takes multiple ‚??paradigmE‚?? etch system orders from a leading memory customer - 21 January 2010

Tool Order: Mattson receives its largest etch tool order - 09 March 2011

Tool Order: Major Asian foundry places multiple Suprema order with Mattson - 14 July 2008

Tool Order: Mattson ships paradigmE Etch system to logic IC manufacturer - 21 October 2010

Tool Order: Ultratech gains Asia foundry as new customer for laser spike anneal system - 13 May 2008

Reader comments

No comments yet!

Post your comment

Name:
Email:
Please enter the word you see in the image below: