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Tool Order: Akrion ships 300mm ‚??Velocity‚?? system to Asia

19 May 2011 | By Mark Osborne | News > Wafer Processing

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A leading-edge memory products manufacturer in Asia is to receive a 300mm ‘Velocity’ single wafer cleaning system from Akrion Systems, which will be used for  the purpose of demonstrating its pre-lithography cleaning capabilities.

“The stellar performance of our Velocity system has been proven in the volume production of various advanced devices in numerous state-of-the-art fabs worldwide,” noted Michael Ioannou, Akrion Systems President and CEO. “We are excited to have this opportunity to expand our installed base and prove to a new customer the many advantages of our single wafer platform."

Akrion’s Velocity system is its most advanced single-wafer platform and more than sixty single wafer systems are currently installed. The platform employs controlled physical force technologies, ultra-dilute chemicals and de-ionized and functional water for critical cleaning applications.

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