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Tool order: AIXTRON installs Rohm and Haasâ??s VaporStation central delivery system

19 March 2009 | By SĂ­le Mc Mahon | News > Wafer Processing

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VaporStationIn the second major tool order for Rohm and Haas in a week, the company has revealed that AIXTRON AG has installed one of its VaporStation central delivery systems at the AIXTRON Applications and Demonstration Center in Aachen, Germany. AIXTRON has begun operations with the system, which will be used to deliver trimethylgallium (TMGa) to a CRIUS and a Planetary MOCVD system.

The technology is claimed to improve the economy and safety of the MOCVD process by reducing cylinder changes and handling, and enables the manufacture of compound semiconductors, such as LEDs, solar cells and laser diodes.
"The performance of the system met with our expectations right from the first run," says Johannes Kaeppeler, AIXTRON’s Vice President of Technology. "Without a single calibration run, gallium nitride (GaN) films made using the central delivery system could not be distinguished from the films made using the conventional onboard delivery method."

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