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Tokyo Electron to use on-site fluorine generator from Linde for Nirasaki R&D facility
17 March 2011 | By Mark Osborne | News >
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Linde Electronics is to supply and install an on-site fluorine generator at Tokyo Electron’s (TEL) Nirasaki R&D facility fabrication plant in Japan to support TEL’s processes and operations. “We are delighted to have the opportunity to work with Tokyo Electron to further develop and extend the range of semiconductor applications for fluorine, and to help customers improve productivity and lower costs with less impact on the environment,” said Carl Jackson, Head of Fluorine Business for Linde Electronics. “Tokyo Electron’s thermal LPCVD1 furnaces have used on-site generated fluorine for many years now at a range of production sites worldwide to reduce costs and improve safety and process control.”