Online information source for semiconductor professionals

Tegal offloads thin film etch and Sputtered Films PVD range to OEM Group

22 March 2010 | By Mark Osborne | News > Wafer Processing

Popular articles

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

TSMC honors suppliers at annual Supply Chain Management Forum - 03 December 2008

Sematech Litho Forum: Sematech mulling multi-beam mask writer effort - 12 May 2010

Sputtered Films Endeavor PVD SystemTegal has sold its legacy thin film etch and physical vapor deposition (PVD) product lines to OEM Group for aggregate consideration of up to US$3 million, of which a US$1 million is subject to OEM Group’s achievement of certain target sales levels. Tegal has previously stated its move to sell non-core activities and indeed offer the company for sale.

“We are honored to continue providing Tegal’s world class Thin Film Etch solutions to the market; and, with the addition of the Sputtered Films technologies to our own PVD focus, we believe we will have an unmatched product offering,” said Wayne Jeveli, President of OEM Group. “Over the course of more than 30 years, Tegal’s brand has symbolized innovation, quality and customer focus. We believe these attributes will continue on for many years at OEM Group.”

Tegal’s 900ACS, 980ACS, 6500 HRe- and 6500 Spectraseries Thin Film Etch products, along with the Sputtered Films Endeavor and AMS PVD series products, intellectual property and process know-how will now be offered by OEM Group.

Tegal will still sell and support its range of Deep Reactive Ion Etch (DRIE) systems that it acquired from Alcatel Micro Machining Systems (AMMS) in September, 2008.

Thomas Mika, President and CEO, Tegal Corporation said, “We are pleased that we have been able to place these products and many of the skilled employees associated with them in a company whose business model is built on the continued sales, service and support of late life cycle technology into new and existing customers and markets.”

Related articles

Tegal and CIMAC to collaborate on semiconductor processing improvements - 21 August 2008

Tool Order: SVTC to use Tegal‚??s etcher for MEMS and other device development - 16 June 2008

Tegal gets boost to plans to exit semiconductor equipment market - 11 February 2011

A Breakthrough in Low-k Barrier/Etch Stop Films for Copper Damascene Applications - 01 March 2000

Tool order: Tegal receives follow-on order for 4200 SE cluster tool - 08 June 2010

Reader comments

No comments yet!

Post your comment

Name:
Email:
Please enter the word you see in the image below: