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Tegal creates etch R&D centre in France

14 May 2009 | By Mark Osborne | News > Wafer Processing

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With the acquisition of Alcatel Micro Machining Systems (AMMS) last year, Tegal Corporation has now established a European R&D centre in Haute Savoie, France to work on advanced etch processes for 3D packaging and MEMS devices.

“It makes excellent business sense to focus our development activities in this European location,” commented Thomas Mika Tegal’s CEO. “Here, through the former AMMS team, we already enjoy an entrenched position with close proximity to key customers and access to technology talent from premier universities. We are very pleased to formalize the new R&D infrastructure where we will continue to innovate advanced DRIE solutions that bring value to customers.”

Tegal said that development of the AMMS DRIE product line was continuing as well as JDPs and consortium programs in which AMMS was involved in.

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