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Tegal and CIMAC to collaborate on semiconductor processing improvements

21 August 2008 | By Síle Mc Mahon | News > Wafer Processing

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TegalTegal Corporation, the semiconductor equipment supplier, has announced that it is entering into a partnership with software solutions company CIMAC. The aim of the collaborative move is to work on enhancing operating systems and user interfaces for Tegal’s AMS PVD thin-film deposition systems.

The Tegal PVD systems provide performance for the reactive sputtering of aluminum nitride films, which are used in the fabrication of piezoelectric devices. CIMAC’s contribution to the partnership will be the provision of software development for Tegal’s operating system, the GUI user interface, and SECS/GEM communications.

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