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ST completes 65nm SOC demonstrator

04 February 2005 | By Syanne Olson | News > Wafer Processing

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STMicroelectronics has claimed an important milestone by delivering a 65nm CMOS design platform. In addition, ST announced the completion of a tape-out, of a 65nm complex system- on-chip to fully demonstrate its advanced technology.

ST's full 65nm library platform includes multiple process options that allow individual cells to be optimized for high performance, low power, or general-purpose use. Each option shrinks 90nm products by half while improving speed up to 30% or reducing leakage by half in operation, according to the company. The platform offers two standard cell libraries, optimized for performance and density, which provide a rich portfolio of more than 1,500 cells; multiple voltage I/O cells; multiple memories; and analog IP. The cells support densities of more than 800,000 gates per square millimeter and a core supply of 1.0V or 1.2V, with metal pitches of 0.20 micron and from six to ten metal routing layers.

"Being the first to deliver a 65nm design platform validates our alliance strategy, in general, and the efforts of the Crolles II Alliance, in particular," said Didier Chapuis, Group Vice President, Platform Development at STMicroelectronics. "Our customers' applications will exhibit spectacular performance at affordable costs because we've overcome the challenges to delivering the 65nm design platform."

A more detailed review of the process platform was revealed during the 2004 MEDEA+ conference. In the FEOL process extensive evaluation of high-k dielectrics had been undertaken, however hafnium oxide HF02 and fine tuned derivatives were not deemed mature enough to be introduced. In BEOL processes little has changed from that used in ST's 90nm platform. Although a wide range of leading porous low-k dielectrics were evaluated the company has stuck with its first generation Black Diamond low-k from Applied Materials.

Further extensions to the initial platform offering, including SOI versions and high-performance integrated passive devices, are at an advanced stage of development and will be available soon. Also, a wafer shuttle reticle service has started for 65nm designs.

STMicroelectronics will also incorporate the ARM1176JZF-S PrimeXsys Platform with TrustZone technology into its Nomadik family of multimedia application processors. The result of a close cooperation with ARM, takes advantage of ST's advanced lowpower 65nm process.

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