Online information source for semiconductor professionals

Spectra FOUPs from Entegris pass FM4911 certification

05 January 2009 | By Mark Osborne | News > Cleanroom

Popular articles

New Product: Applied Materials new EUV reticle etch system provides nanometer-level accuracy - 19 September 2011

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

New Product: ASML Brion‚??s Tachyon MB-SRAF enables OPC-like compute times - 19 September 2011

Spectra FOUP’s from Entegris pass FM4911 certificationFM Approvals has granted Entegris FM4911 certification for its ‘Spectra’ 300mm Front Opening Unified Pod, the first supplier to attain the fire safety certification, according to Entegris. The FOUP passed all tests required and is now claimed to be able to limit the spread of a potential cleanroom fire and damge from smoke. The certification could lead to fabs being able to reduce insurance rates, Entegris said.

Related articles

Entegris buys into poly silicon products company IMI - 06 March 2008

Spectra Gases get rebranding to Linde - 30 October 2009

Entegris opens office in India to support PV and microelectronics businesses - 02 July 2008

SMIC S2/FAB 8 gains BSI ISO27001 management security audit - 26 September 2008

Entegris restructures U.S. manufacturing operations - 05 November 2008

Reader comments

No comments yet!

Post your comment

Name:
Email:
Please enter the word you see in the image below: