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Spectra FOUPs from Entegris pass FM4911 certification
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FM Approvals has granted Entegris FM4911 certification for its ‘Spectra’ 300mm Front Opening Unified Pod, the first supplier to attain the fire safety certification, according to Entegris. The FOUP passed all tests required and is now claimed to be able to limit the spread of a potential cleanroom fire and damge from smoke. The certification could lead to fabs being able to reduce insurance rates, Entegris said.