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IMEC has licensed its ellipsometric porosimetry (EP) technology to Sopra in an effort to assist in the on-going development of ultra-low k materials.  IMEC pioneered the use of EP for its Advanced Interconnect Solutions R&D Program. The R&D EP tool was extensively benchmarked with other porosimetry technologies (e.g. PAIS SAXS, SANS). and excellent agreement was demonstrated.  Sopra ad its first commercial products using EP shipping in Summer of 2004.


IMEC has also developed novel applications such as pore sealing tests and Young s modulus extraction of low-k dielectrics using the EP technique.  The EP software allows calculating all above-mentioned characteristics.  Complete analysis including measurements and calculations does not exceed 2 hours.  The same tool can be used to study thermal stability and modification of the film during the outgassing.