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SEMICON West Sustainable Technologies Award finalists revealed

13 July 2010 | By Mark Osborne | News > Cleanroom, EHS

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Pall Corporation Water Reclaim SystemFive finalists have been listed for this year's SEMICON West, Sustainable Technologies Award, which includes Applied Materials, Edwards, Pall, Tokyo Electron and Verigy. The annual award recognizes equipment, materials or services that have been introduced to the marketplace in the last three years that can contribute to sustainable improvement of the environment.

Applied Materials was nominated for its iSYS integrated subfab system that synchronizes the operation of vacuum pumping and abatement technologies from 10 major suppliers with the wafer processing tool.

Edwards Ltd. for “eZenith”: the eZenith integrated vacuum and abatement system from Edwards was also included due to its ability to reduce power consumption by 10% on vacuum pumps and 50% lower fuel usage for gas abatement over earlier product versions.

Tokyo Electron’s EXPEDIUS+ de-ionized water (DIW) flow valve, which has the ability to open and close intermittently for idling mode, and a built-in scrubber results in significant reductions of water use, IsoPropyl Alcohol (IPA) consumption, and volatile organic compound (VOC) load impact.

Pall Corporation for its Water Reclaim Systems in Silicon Processing has fully automated, crossflow filtration system, which enables water to be reclaimed from silicon processing operations, typically resulting in 90% of the spent process water being recovered.

Finally, Verigy was nominated as a finalist for its V93000 Test Platform, which conforms to virtually all International Standardization Organization (ISO), Restriction of Hazardous Substances (RoHS) and Waste Electrical and Electronic Equipment (WEEE) guidelines for low environmental impact, Verigy’s V93000 test platform is environmentally sustainable in its make-up, operation and lifelong use, according to SEMI.

Representatives from each of the five finalist companies will be recognized at the EHS Global Care Executive Lunch at SEMICON West 2010 on Tuesday, July 13.

A single award winner will be selected from these five finalists. The award winner will be announced at the SEMICON West TechSITE, taking place on Wednesday, July 14 at 11:30 AM at the San Francisco Moscone Center in South Hall.

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