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SEMICON: SUSS MicroTec to supply imec with first EUVL mask management system
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SUSS MicroTec is to ship the first MaskTrack Pro InSync - the first holistic in-fab EUVL mask management offering to imec in Belgium, in August 2011. MTP InSync is a stand-alone or clustered handling system which seamlessly synchronizes mask cleaning, handling, inspection and storage in a single controlled environment.“EUV lithography places tremendous demands on mask integrity at point-of-exposure,” said Frank P. Averdung, President and CEO of SUSS MicroTec AG. “Only MaskTrack Pro InSync, delivers the technology necessary to achieve a zero particle mask management environment, enabling chipmakers to capitalize on important lithography scanner availability. This state-of-the-art mask management system establishes our continued commitment to providing our customers with a mask integrity infrastructure for Next Generation Lithography.”
The MaskTrack Pro InSync is said to be the first mask management system available in the market that can interface directly with the specific EUV Dual Pod in a fully-controlled environment.