Online information source for semiconductor professionals

SEMICON: SMIC selects Matheson as TGCM provider at Shanghai fab

13 July 2011 | By Mark Osborne | News > Materials and Gases

Popular articles

New Product: Applied Materials new EUV reticle etch system provides nanometer-level accuracy - 19 September 2011

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

New Product: ASML Brion‚??s Tachyon MB-SRAF enables OPC-like compute times - 19 September 2011

Matheson has become the Total Gas and Chemical Management (TGCM) provider for SMIC’s foundry fab in Shanghai, China. Matheson will be responsible for inventory, delivery and hook up of the facility’s process gases and chemicals as well as overseeing the operation and maintenance of the facility’s gas and chemical delivery systems.  

“We appreciate the opportunity to show SMIC how Matheson can help them enhance the safety, efficiency, reliability and cost savings of their gas and chemical operations”, said Todd Givens, Matheson ’s Regional Operations Director and General Manager  .  

SMIC has a 300mm wafer fabrication facility and three 200mm wafer fabs in its Shanghai mega-fab cluster.

Related articles

SMIC to spin off package and test units and expand solar operations in Shanghai - 19 March 2009

Directorial reshuffles at SMIC - 30 January 2009

SMIC to offer 40nm half node process at Shanghai 300mm fab - 15 October 2009

SMIC appoints Hua Hong NEC executive at new CEO - 08 August 2011

Matheson Tri-Gas gains rights to Gelest‚??s high purity germane product - 06 January 2010

Reader comments

No comments yet!

Post your comment

Please enter the word you see in the image below: