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POWERLASE to supply DPSS lasers to EUVA
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POWERLASE is to supply nanosecond Q-switched, diode-pumped solid
state (DPSS) lasers to the Extreme Ultraviolet Lithography System
Development Association (EUVA) for research efforts to perfect the use
of discharge-produced plasma (DPP) light source.
“The requirement for a viable EUVL technology is becoming increasingly
important, as traditional techniques reach the end of their lifespan,”
said Dr Samir Ellwi, POWERLASE Vice President of Strategic Technology.
“As such, we are very pleased to begin a new phase of research with the
EUVA. The continued partnership will ensure the deadline for the
creation of a 32nm technique is achieved.”
POWERLASE
is currently engaged in research projects with the University of
Central Florida (UCF) and University College Dublin (UCD).