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Oxford Instruments to use ITRI facilities for process demonstrations

08 February 2011 | By Mark Osborne | News > Wafer Processing

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The Industrial Technology Research Institute (ITRI) in Taiwan is being used as a process demonstration and tool performance service centre for Oxford Instruments range of technologies after three more plasma tools are delivered to the R&D facility. The agreement is based on Oxford Instruments providing an HBLED related process research centre staffed by Oxford Instruments’ process engineers at ITRI.

“In the materials chemical technology and nano technology fields, amongst others, ITRI collaborates with prominent industries in Taiwan and worldwide to develop and to promote the establishment of high-value industries and application of nanotechnology by traditional industries,” noted Dr. Shing-Yuan Tsai, Vice president of ITRI. “Our collaboration with Oxford Instruments clearly shows that our research expertise and facilities are among the best in the world, and we are certain the relationship between our two organisations will be mutually beneficial.”

Oxford Instruments said that other tools were already used at ITRI and that further tool placements would be made in a later phase of collaboration.

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