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Order Focus: Veeco ships TurboDisc MOCVD tool to LG Siltron

08 February 2012 | By Síle Mc Mahon | News > Wafer Processing

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Veeco's TurboDiscVeeco Instruments has revealed that it has received an order for one of its TurboDisc MOCVD tools from South Korean epi wafer manufacturer, LG Siltron. The TurboDisc tool is a K465i gallium nitride MOCVD system for production of gallium nitride on silicon (GaN-on-Si) wafers for power electronics and LED devices.

"We are pleased to have chosen the TurboDisc K465i MOCVD System as our first GaN-on-Si production system”, commented Dr. Hee Bog Kang, LG Siltron R&D’s general manager. “It offers unparalleled throughput advantages, and its TurboDisc technology provides superior uniformity and low particle count, which is critical for producing GaN-on-Si wafers. We appreciate the strong support we have received from Veeco, and look forward to this and future collaborations."

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